Development of an Abbe Error Free Micro Coordinate Measuring Machine
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چکیده
منابع مشابه
Development of an Abbe Error Free Micro Coordinate Measuring Machine
A micro Coordinate Measuring Machine (CMM) with the measurement volume of 50 mm ˆ 50 mm ˆ 50 mm and measuring accuracy of about 100 nm (2σ) has been developed. In this new micro CMM, an XYZ stage, which is driven by three piezo-motors in X, Y and Z directions, can achieve the drive resolution of about 1 nm and the stroke of more than 50 mm. In order to reduce the crosstalk among X-, Yand Z-stag...
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ژورنال
عنوان ژورنال: Applied Sciences
سال: 2016
ISSN: 2076-3417
DOI: 10.3390/app6040097